Edwards CTI-Cryogenics IS cryopump systems leverage innovative, high-efficiency technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network.

IS 320FX Cryopump

The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today's Ion Implant processes, provides enhanced hydrogen pumping speed and capacity, while maintaining the quality, performance and reliability you have come to expect. ​

Features & Benefits​

• Specifically designed for Ion Implant applications​
   
• Optimised for tool throughput​
   
• Intelligent “self-adjusting” technology
   
• Lower cost of ownership​
   
• Increased uptime​
  
   

Download CTI On Board IS

Download CTI On Board IS 320FX